Chemical and biological sensors based on nanomembrane technology

Ozgenc Ebil; Ahmed S. Sharkawy; Mathew J. Zablocki; Dennis W. Prather

doi:10.1117/12.852435

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23 April 2010 Chemical and biological sensors based on nanomembrane technology

Ozgenc Ebil, Ahmed S. Sharkawy, Mathew J. Zablocki, Dennis W. Prather

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Proceedings Volume 7673, Advanced Environmental, Chemical, and Biological Sensing Technologies VII; 767308 (2010) https://doi.org/10.1117/12.852435
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

There is a growing need for miniature low-cost chemical sensors in monitoring environmental conditions. Applications range from environmental pollution monitoring, industrial process control and homeland security threat detection to biomedical diagnostics. Integrated opto-electronic sensors can provide chemical & biological sensing by monitoring attachment induced changes in the refractive, absorptive, or luminescent properties of materials. Nanomembranes (NMs) are single crystals that have been released from SOI substrates and redeposited on foreign flexible or flat substrates enabling the best features of different materials. Silicon Nanomembrane technology can enable the fabrication of compact, replaceable/disposable and highly sensitive optoelectronic sensors for chemical and biological sensing.

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Ozgenc Ebil, Ahmed S. Sharkawy, Mathew J. Zablocki, and Dennis W. Prather "Chemical and biological sensors based on nanomembrane technology", Proc. SPIE 7673, Advanced Environmental, Chemical, and Biological Sensing Technologies VII, 767308 (23 April 2010); https://doi.org/10.1117/12.852435

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