Sensing with locally self-assembled one-dimensional nanostructures

Ongi Englander

doi:10.1117/12.849890

5 May 2010 Sensing with locally self-assembled one-dimensional nanostructures

Ongi Englander

Proceedings Volume 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II; 767919 (2010) https://doi.org/10.1117/12.849890
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

One-dimensional nanostructures have attracted considerable interest as potential building blocks and functional components in next generation nanoscale sensing, nanoelectromechanical systems (NEMS), circuits, and interconnect applications. The integration and assembly of one-dimensional nanostructures into such device architectures remains a significant challenge. Techniques for site-specific synthesis and self-assembly of one-dimensional nanostructures have proved suitable for a range of integrated nanostructure based-sensing applications yielding robust sensing capabilities realized with a streamlined fabrication process. Specifically, localized heating has emerged as a viable technique for the site specific synthesis of one-dimensional nanostructures. By localizing the heat source, the extent of chemical vapor deposition synthesis reactions can be confined to well-defined, microscale regions. Using the localized synthesis and self-assembly approach, proof-of-concept gas and pressure sensing applications have been demonstrated. The integration and self-assembly approach and sensing applications are described.

Citation Download Citation

Ongi Englander "Sensing with locally self-assembled one-dimensional nanostructures", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 767919 (5 May 2010); https://doi.org/10.1117/12.849890

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