Pulsed digital oscillators as a tool for the selective activation of MEMS resonant modes

Manuel Dominguez-Pumar; Elena Blokhina; Joan Pons-Nin; Orla Feely; Jose Luis Sanchez-Rojas

doi:10.1117/12.853069

5 May 2010 Pulsed digital oscillators as a tool for the selective activation of MEMS resonant modes

Manuel Dominguez-Pumar, Elena Blokhina, Joan Pons-Nin, Orla Feely, Jose Luis Sanchez-Rojas

Proceedings Volume 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II; 76792H (2010) https://doi.org/10.1117/12.853069
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

The purpose of this work is to show that it is possible to excite selectively different resonant modes of a MEMS resonator, by simply changing some parameters in the feedback filter of Pulsed Digital Oscillators (PDOs). Extensive simulation and experimental results are presented showing the goodness of the proposed approach. An iterative map, contemplating more than one resonance, is also obtained from the equation governing the motion of a cantilever.

Citation Download Citation

Manuel Dominguez-Pumar, Elena Blokhina, Joan Pons-Nin, Orla Feely, and Jose Luis Sanchez-Rojas "Pulsed digital oscillators as a tool for the selective activation of MEMS resonant modes", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76792H (5 May 2010); https://doi.org/10.1117/12.853069

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