Dielectric charging control for electrostatic MEMS switches

Manuel Domínguez; David López; David Molinero; Joan Pons-Nin

doi:10.1117/12.853177

5 May 2010 Dielectric charging control for electrostatic MEMS switches

Manuel Domínguez, David López, David Molinero, Joan Pons-Nin

Proceedings Volume 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II; 76792J (2010) https://doi.org/10.1117/12.853177
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

This work introduces a new control method to dynamically mitigate the effects of the parasitic charge injected in dielectric layers of electrostatic MEMS switches. This method can be used to increase lifetime and reliability of electrostatically actuated MEMS devices. The method is based on the opposite behaviors exhibited by the dielectric charging phenomena when voltage stresses of different polarity are applied to a given device. To this effect, a sigmadelta sensing and actuation scheme has been implemented: device capacitance is periodically sampled and, according to the value obtained, positive or negative actuation voltages are applied. Preliminary experimental results with two different MEMS devices that demonstrate the feasibility of this method are introduced and discussed.

Citation Download Citation

Manuel Domínguez, David López, David Molinero, and Joan Pons-Nin "Dielectric charging control for electrostatic MEMS switches", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76792J (5 May 2010); https://doi.org/10.1117/12.853177

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