Fabrication of GaN/AlGaN 1D photonic crystals designed for nonlinear optical applications

T. Stomeo; G. Epifani; V. Tasco; A. Massaro; I. Tarantini; A. Campa; M. De Vittorio; A. Passaseo; M. Braccini; M. C. Larciprete; C. Sibilia; F. A. Bovino

doi:10.1117/12.854470

13 May 2010 Fabrication of GaN/AlGaN 1D photonic crystals designed for nonlinear optical applications

T. Stomeo, G. Epifani, V. Tasco, A. Massaro, I. Tarantini, A. Campa, M. De Vittorio, A. Passaseo, M. Braccini, M. C. Larciprete, C. Sibilia, F. A. Bovino

Author Affiliations +

Proceedings Volume 7713, Photonic Crystal Materials and Devices IX; 771316 (2010) https://doi.org/10.1117/12.854470
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

In this paper we present a reliable process to fabricate GaN/AlGaN one dimensional photonic crystal (1D-PhC) microcavities with nonlinear optical properties. We used a heterostructure with a GaN layer embedded between two AlGaN/GaN Distributed Bragg Reflectors on sapphire substrate, designed to generate a λ= 800 nm frequency downconverted signal (χ⁽²⁾ effect) from an incident pump signal at λ= 400 nm. The heterostructure was epitaxially grown by metal organic chemical vapour deposition (MOCVD) and integrates a properly designed 1D-PhC grating, which amplifies the signal by exploiting the double effect of cavity resonance and non linear GaN enhancement. The integrated 1D-PhC microcavity was fabricate combing a high resolution e-beam writing with a deep etching technique. For the pattern transfer we used ~ 170 nm layer Cr metal etch mask obtained by means of high quality lift-off technique based on the use of bi-layer resist (PMMA/MMA). At the same time, plasma conditions have been optimized in order to achieve deeply etched structures (depth over 1 micron) with a good verticality of the sidewalls (very close to 90°). Gratings with well controlled sizes (periods of 150 nm, 230 nm and 400 nm respectively) were achieved after the pattern is transferred to the GaN/AlGaN heterostructure.

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T. Stomeo, G. Epifani, V. Tasco, A. Massaro, I. Tarantini, A. Campa, M. De Vittorio, A. Passaseo, M. Braccini, M. C. Larciprete, C. Sibilia, and F. A. Bovino "Fabrication of GaN/AlGaN 1D photonic crystals designed for nonlinear optical applications", Proc. SPIE 7713, Photonic Crystal Materials and Devices IX, 771316 (13 May 2010); https://doi.org/10.1117/12.854470

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