Nanometre control and determination of hole size in photonic crystal slabs

Daryl M. Beggs; Liam O'Faolain; Thomas F. Krauss

doi:10.1117/12.854969

13 May 2010 Nanometre control and determination of hole size in photonic crystal slabs

Daryl M. Beggs, Liam O'Faolain, Thomas F. Krauss

Proceedings Volume 7713, Photonic Crystal Materials and Devices IX; 77131Y (2010) https://doi.org/10.1117/12.854969
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

All photonic crystal slab designs rely on the accurate control of the sizes of the holes during fabrication - a small error of just a few nanometers can mean a shift of tens of nanometers in the operating wavelength of the device. A key problem is the measurement of the hole size. We have developed an optical method which determines the functional hole diameter with a typical accuracy of 5 nm. We also suggest a way for the nanometre control of the hole diameter.

Citation Download Citation

Daryl M. Beggs, Liam O'Faolain, and Thomas F. Krauss "Nanometre control and determination of hole size in photonic crystal slabs", Proc. SPIE 7713, Photonic Crystal Materials and Devices IX, 77131Y (13 May 2010); https://doi.org/10.1117/12.854969

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