Micro-optical elements functioning in non-visible spectral range

Qin Wang; Andy Z. Z. Zhang; Andreas Bergström; Vicky Z. J. Huo; Susanne Almqvist; Wlodek Kaplan; Jan Y. Andersson

doi:10.1117/12.853959

12 May 2010 Micro-optical elements functioning in non-visible spectral range

Qin Wang, Andy Z. Z. Zhang, Andreas Bergström, Vicky Z. J. Huo, Susanne Almqvist, Wlodek Kaplan, Jan Y. Andersson

Proceedings Volume 7716, Micro-Optics 2010; 771609 (2010) https://doi.org/10.1117/12.853959
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

Nowadays novel micro-fabrication and wafer-based manufacturing approach allows realizing micro-optics in a way scientists have dreamt for generations, in particular, utilizing nano-imprint lithography as fabrication tooling enables greatly accelerating the micro-optics technology to its frontier. In this report, we present wafer-scale fabrication of various types of micro-optical elements based on photoresist, benzocyclobutene, photocurable imprint resist, and semiconductor materials by using thermal reflow, reactive ion etching, and imprint techniques. Especially, several concave or convex 3-dimensional micro-optical structures shaped by imprint method are detailed. These micro-optical elements can be monolithically or hybrid integrated onto optoelectronics devices, such as photodetectors and emitters as optical beam focuser, collimator, filter, or anti-reflectance elements. As application examples, polymer microlenses were integrated directly on the top of UV dual functional devices and quantum dot long wavelength infrared photodetectors, respectively.

Citation Download Citation

Qin Wang, Andy Z. Z. Zhang, Andreas Bergström, Vicky Z. J. Huo, Susanne Almqvist, Wlodek Kaplan, and Jan Y. Andersson "Micro-optical elements functioning in non-visible spectral range", Proc. SPIE 7716, Micro-Optics 2010, 771609 (12 May 2010); https://doi.org/10.1117/12.853959

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