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12 May 2010 Membrane-based aberration-corrected tunable micro-lenses
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Abstract
We present measurements and simulations of membrane-based micro-lens stacks, tunable in focal length in the range of 10mm to 50mm without chromatic aberration. The pressure-actuated, liquid-filled, membrane-based micro-lenses are fabricated by an all-silicone molding approach and consist of three chambers separated by two highly flexible silicone-membranes. Based on the idea of the classical achromatic Fraunhofer doublet, two different liquids with suitable optical properties are used. Pressure-dependent surface topologies are measured by profilometry for determining the correlation between refraction and applied pressure. The profiles are fit to polynomials; the coefficients of the polynomials are pressure-dependent and fit to empirically determined functions which are then used as an input for optical ray-tracing. Using this approach, the focal length is tunable while compensating for chromatic aberration by suitably applied pressures.
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Philipp Waibel, Eugen Ermantraut, Daniel Mader, Hans Zappe, and Andreas Seifert "Membrane-based aberration-corrected tunable micro-lenses", Proc. SPIE 7716, Micro-Optics 2010, 77160E (12 May 2010); https://doi.org/10.1117/12.853140
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