Deep proton writing: a powerful rapid prototyping technology for various micro-optical components

Jürgen Van Erps; Michael Vervaeke; Christof Debaes; Heidi Ottevaere; Sara Van Overmeire; Alex Hermanne; Hugo Thienpont

doi:10.1117/12.853645

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13 May 2010 Deep proton writing: a powerful rapid prototyping technology for various micro-optical components

Jürgen Van Erps, Michael Vervaeke, Christof Debaes, Heidi Ottevaere, Sara Van Overmeire, Alex Hermanne, Hugo Thienpont

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Proceedings Volume 7716, Micro-Optics 2010; 77160W (2010) https://doi.org/10.1117/12.853645
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

One of the important challenges for the deployment of the emerging breed of nanotechnology components is interfacing them with the external world, preferably accomplished with low-cost micro-optical devices. For the fabrication of this kind of micro-optical modules, we make use of deep proton writing (DPW) as a generic rapid prototyping technology. DPW consists of bombarding polymer samples with swift protons, which results after chemical processing steps in high quality micro-optical components. The strength of the DPW micro-machining technology is the ability to fabricate monolithic building blocks that include micro-optical and mechanical functionalities which can be precisely integrated into more complex photonic systems. In this paper we give an overview of the process steps of the technology and we present several examples of micro-optical and micro-mechanical components, fabricated through DPW, targeting applications in optical interconnections and in bio-photonics. These include: high-precision 2-D fiber connectors, out-of-plane coupling structures featuring high-quality 45° and curved micro-mirrors, arrays of high aspect ratio micro-pillars, and fluorescence and absorption detection bio-photonics modules. While DPW is clearly not a mass fabrication technique as such, one of its assets is that once the master component has been prototyped, a metal mould can be generated from the DPW master by applying electroplating. After removal of the plastic master, this metal mould can be used as a shim in a final microinjection moulding or hot embossing step. This way, the master component can be mass-produced at low cost in a wide variety of high-tech plastics.

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Jürgen Van Erps, Michael Vervaeke, Christof Debaes, Heidi Ottevaere, Sara Van Overmeire, Alex Hermanne, and Hugo Thienpont "Deep proton writing: a powerful rapid prototyping technology for various micro-optical components", Proc. SPIE 7716, Micro-Optics 2010, 77160W (13 May 2010); https://doi.org/10.1117/12.853645

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