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13 May 2010 Active modular microsystems based on Mach-Zehnder interferometers
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Cost efficient and purpose build microsystems for technical applications become more and more relevant. In the field of optical devices we developed an adaptive modular micro-optical system based on a Mach-Zehnder Delay Interferometer to show the feasibility to fabricate active optical microsystems adaptive to different measurement and data communication network applications. To realize such an adaptive modular micro-optical system with an active tuning device, a construction kit was designed and realized to combine different types of signal routing and system tuning, for example by choosing an optical or electronical signal output and different microactuators suitable for several applications, with special designed micro-optical benches (MOB) including the respective optical structures or hybrid integrated components. It is based on automated passive alignment of the optical components and has to be designed by using well defined interfaces. Different types of this modular system have been set-up and the application as a Fourier transformed wavemeter are shown as an example.
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Sven Schuele, Stefan Hengsbach, Uwe Hollenbach, Jingshi Li, Jürg Leuthold, and Juergen Mohr "Active modular microsystems based on Mach-Zehnder interferometers", Proc. SPIE 7716, Micro-Optics 2010, 771610 (13 May 2010);

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