Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range

J.-U. Schmidt; M. Bring; J. Heber; M. Friedrichs; D. Rudloff; J. Rößler; D. Berndt; H. Neumann; W. Kluge; M. Eckert; M. List; M. Müller; M. Wagner

doi:10.1117/12.855750

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14 May 2010 Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range

J.-U. Schmidt, M. Bring, J. Heber, M. Friedrichs, D. Rudloff, J. Rößler, D. Berndt, H. Neumann, W. Kluge, M. Eckert, M. List, M. Müller, M. Wagner

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Proceedings Volume 7716, Micro-Optics 2010; 77162L (2010) https://doi.org/10.1117/12.855750
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

A new generation of micromirror arrays (MMAs) with torsional actuators is being developed within the European research project MEMI in order to extend the usable spectral range of diffractive MMAs from deep ultraviolet into the visible and near infrared. The MMAs have 256 x 256 pixels reaching deflections above 350 nm at a frame rate of 1 kHz, which enables an operation in the target wavelength range between 240 nm and 800 nm. Customized driver electronics facilitates computer controlled operation and simple integration of the MMA into various optical setups. Tests in the visible wavelength range demonstrate the functionality and the high application potential of first MMA test samples.

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J.-U. Schmidt, M. Bring, J. Heber, M. Friedrichs, D. Rudloff, J. Rößler, D. Berndt, H. Neumann, W. Kluge, M. Eckert, M. List, M. Müller, and M. Wagner "Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range", Proc. SPIE 7716, Micro-Optics 2010, 77162L (14 May 2010); https://doi.org/10.1117/12.855750

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