Characterization of the scattering effect of complex mask geometries with surface roughness

Z. Rahimi; A. Erdmann; C. Pflaum

doi:10.1117/12.853726

5 May 2010 Characterization of the scattering effect of complex mask geometries with surface roughness

Z. Rahimi, A. Erdmann, C. Pflaum

Proceedings Volume 7717, Optical Modelling and Design; 771709 (2010) https://doi.org/10.1117/12.853726
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We present a finite integration technique (FIT) simulator for modelling light diffraction from lithographic masks with complex shapes. This method has high flexibility in geometrical modelling and treating curved boundaries. The inherent feature of FIT allows more accurate electromagnetic field simulation in complex structures. This technique is also suited for fast EMF simulations and large 3D problems because of its parallelisation potential. We applied this method to investigate the effect of complex mask shapes on the printed image. We demonstrate results for a phase-shift mask (PSM) with footing extensions and surface roughness.

Citation Download Citation

Z. Rahimi, A. Erdmann, and C. Pflaum "Characterization of the scattering effect of complex mask geometries with surface roughness", Proc. SPIE 7717, Optical Modelling and Design, 771709 (5 May 2010); https://doi.org/10.1117/12.853726

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