Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared region

H. Ottevaere; N. Vermeulen; V. Gomez; H. Thienpont

doi:10.1117/12.854690

14 May 2010 Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared region

H. Ottevaere, N. Vermeulen, V. Gomez, H. Thienpont

Author Affiliations +

Proceedings Volume 7718, Optical Micro- and Nanometrology III; 77180N (2010) https://doi.org/10.1117/12.854690
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We present a Mach-Zehnder interferometer to characterize semiconductor microlenses in transmission. We therefore make use of a wavelength of 1550nm with the possibility of expansion towards the IR spectrum. In this paper, the concept of our interferometer as well as the set-up is explained. We demonstrate the working principle and measurements on fused silica and silicon microlenses and benchmark the experimental results with measurement data obtained with well established micro-optics instrumentation tools.

Citation Download Citation

H. Ottevaere, N. Vermeulen, V. Gomez, and H. Thienpont "Optical characterization of semiconductor microlenses using a Mach-Zehnder interferometer in the near-infrared region", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180N (14 May 2010); https://doi.org/10.1117/12.854690

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available