Evolution of black silicon nano- and micro-scale surface topologies upon femtosecond laser irradiation

S. I. Kudryashov; E. V. Golosov; A. A. Ionin; Yu. R. Kolobov; A. E. Ligachev; S. V. Makarov; Yu. N. Novoselov; L. V. Seleznev; D. V. Sinitsyn

doi:10.1117/12.854511

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17 May 2010 Evolution of black silicon nano- and micro-scale surface topologies upon femtosecond laser irradiation

S. I. Kudryashov, E. V. Golosov, A. A. Ionin, Yu. R. Kolobov, A. E. Ligachev, S. V. Makarov, Yu. N. Novoselov, L. V. Seleznev, D. V. Sinitsyn

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Proceedings Volume 7719, Silicon Photonics and Photonic Integrated Circuits II; 771921 (2010) https://doi.org/10.1117/12.854511
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

Gradual evolution of silicon surface topology from one-dimensional to two-dimensional nanogratings and then to isotropic sets of nanospikes was observed by increasing IR and UV femtosecond laser irradiation dose (the variable number of incident laser pulses at the constant laser fluence). The fundamental mechanisms of these topological transformations are discussed.

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S. I. Kudryashov, E. V. Golosov, A. A. Ionin, Yu. R. Kolobov, A. E. Ligachev, S. V. Makarov, Yu. N. Novoselov, L. V. Seleznev, and D. V. Sinitsyn "Evolution of black silicon nano- and micro-scale surface topologies upon femtosecond laser irradiation", Proc. SPIE 7719, Silicon Photonics and Photonic Integrated Circuits II, 771921 (17 May 2010); https://doi.org/10.1117/12.854511

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