Advanced 3D metrology atomic force microscope with crosstalk eliminated

Yueming Hua; Cynthia Coggins; Sung Park; Sang-il Park

doi:10.1117/12.853679

3 June 2010 Advanced 3D metrology atomic force microscope with crosstalk eliminated

Yueming Hua, Cynthia Coggins, Sung Park, Sang-il Park

Proceedings Volume 7729, Scanning Microscopy 2010; 77290N (2010) https://doi.org/10.1117/12.853679
Event: Scanning Microscopy 2010, 2010, Monterey, California, United States

Abstract

The first generation AFM based on piezoelectric tube scanners has high spatial resolution and performs well in qualitative measurements. However, it suffers from poor repeatability and accuracy due to the background curvature and crosstalk between the x-y-z axes, making it inadequate for quantitative metrology. We developed a new AFM platform with a x-y flexure scanner, decoupled from the z scanner, which has a highly orthogonal and flat scan. The high speed z scanner with minimized drive mass provides a fast z servo response, making true non-contact AFM practical. The new AFM can also be used in critical angle measurements of microstructures such as reflective LCD display substrates. The design concept of the new AFM was utilized to measure under-cut structures by intentionally changing the angle of the z scanner, enabling the measurement and imaging of undercut structures as well as vertical sidewalls for the first time in AFM history.

Citation Download Citation

Yueming Hua, Cynthia Coggins, Sung Park, and Sang-il Park "Advanced 3D metrology atomic force microscope with crosstalk eliminated", Proc. SPIE 7729, Scanning Microscopy 2010, 77290N (3 June 2010); https://doi.org/10.1117/12.853679

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