Translator Disclaimer
Paper
30 June 1987 Development Of Compact Synchrotron Radiation Ring For X-Ray Lithography
Author Affiliations +
Abstract
The design parameters of a compact synchrotron radiation (SR)ring dedicated to industrial X-ray lithography are discussed. Further studies have been continued for making the SR ring and its injector smaller to complete a practical SR system. The Electrotechnical Laboratory and Sumitomo Electric Industries, Ltd. jointly completed a conventional compact test ring "NIJI-1 (rainbow-1 in English)" and succeeded in SR generation on February 1986. Presented here are useful results indispensable for the development of a compact SR system.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hiroshi Takada, Kouhei Furukawa, and Takio Tomimasu "Development Of Compact Synchrotron Radiation Ring For X-Ray Lithography", Proc. SPIE 0773, Electron-Beam, X-Ray, and Ion-Beam Lithographies VI, (30 June 1987); https://doi.org/10.1117/12.940379
PROCEEDINGS
7 PAGES


SHARE
Advertisement
Advertisement
Back to Top