Investigation of gradient structures prepared by laser ablation method

Jerzy Ciosek; Boguslaw Budner; Sylwia Burdynska; Marcin Jedynski; Roman Minikayev; Artur Prokopiuk; Waldemar Mroz

doi:10.1117/12.881915

14 December 2010 Investigation of gradient structures prepared by laser ablation method

Jerzy Ciosek, Boguslaw Budner, Sylwia Burdynska, Marcin Jedynski, Roman Minikayev, Artur Prokopiuk, Waldemar Mroz

Proceedings Volume 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 77461E (2010) https://doi.org/10.1117/12.881915
Event: 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2010, Liptovsky Jan, Slovakia

Abstract

Gradient structures are very important for sensors, laser and wave-guide techniques, telecommunications and other techniques which employ radiation propagation and conversion. By varying admixture concentration, the stress occurring in the structure may increase or reduce, which is vital for charge carrier movement velocity. We discusse two kind of gradient structures of thin TiNx layer with a total thickness of approximately 22 nm deposited on the Si(100) substrate and multi-layer structures with a Si-Pd and Si-Mg bi-layer periods. The gradient structures were deposited using a laser ablation of target-compound materials. A Lambda Physics excimer laser (model LPX 305i; t ~ 15 ns, λ = 193 nm) with f = 5 Hz operating frequency was used for layer depositing. The analyses confirmed the presence of the gradient distribution of deposited materials. The gradient structures proved highly sensitive to both thermal effects and strong adsorption of ambient gases. The usefulness of titanium-containing structures for gas, especially hydrogen and oxygen, sensors was confirmed. Due to the strong gas adsorption, the gradient structures used in radiation conversion or waveguide technology should be adequately protected against ambient conditions.

Citation Download Citation

Jerzy Ciosek, Boguslaw Budner, Sylwia Burdynska, Marcin Jedynski, Roman Minikayev, Artur Prokopiuk, and Waldemar Mroz "Investigation of gradient structures prepared by laser ablation method", Proc. SPIE 7746, 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 77461E (14 December 2010); https://doi.org/10.1117/12.881915

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KEYWORDS

Palladium

Ions

Statistical analysis

Silicon

Laser ablation

Diffusion

Nitrogen

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