Fabrication, substructure and properties of LiNbO[sub]3[/sub] films

V. Iyevlev; A. Kostyuchenko; M. Sumets

doi:10.1117/12.879075

17 January 2011 Fabrication, substructure and properties of LiNbO₃ films

V. Iyevlev, A. Kostyuchenko, M. Sumets

Proceedings Volume 7747, 16th International School on Quantum Electronics: Laser Physics and Applications; 77471J (2011) https://doi.org/10.1117/12.879075
Event: XVI International School on Quantum Electronics: Laser Physics and Applications, 2010, Nessebar, Bulgaria

Abstract

By the method of magnetron sputtering the nanocrystalline films LiNbO₃ on the surfaces of (001)Si, (111)Si and of Si- SiO2 heterostructure have been synthesized. The elemental and phase composition, structure and surface morphology, the electrical-physical parameters of the heterostructures (001)Si-LiNbO₃ and (111)Si-SiO₂-LiNbO₃ have been studied.

Citation Download Citation

V. Iyevlev, A. Kostyuchenko, and M. Sumets "Fabrication, substructure and properties of LiNbO₃ films", Proc. SPIE 7747, 16th International School on Quantum Electronics: Laser Physics and Applications, 77471J (17 January 2011); https://doi.org/10.1117/12.879075

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