A High-Precision, Wide Dynamic Range CCD Based Image Acquisition System

Robert E. Melen; Stephen Williams

doi:10.1117/12.940420

17 April 1987 A High-Precision, Wide Dynamic Range CCD Based Image Acquisition System

Robert E. Melen, Stephen Williams

Proceedings Volume 0775, Integrated Circuit Metrology, Inspection, & Process Control; (1987) https://doi.org/10.1117/12.940420
Event: Microlithography Conferences, 1987, Santa Clara, CA, United States

Abstract

This paper describes a novel camera system to make precise measurements over a wide dynamic range of light intensities. The camera has been developed to provide measurements of very small (<1 micrometre) features on semiconductor wafers, observed through high-precision optical microscopes. As such, the system provides the basis of a high precision image acquisition system for use in an advanced line-width measuring instrument.

Citation Download Citation

Robert E. Melen and Stephen Williams "A High-Precision, Wide Dynamic Range CCD Based Image Acquisition System", Proc. SPIE 0775, Integrated Circuit Metrology, Inspection, & Process Control, (17 April 1987); https://doi.org/10.1117/12.940420

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