Paper
8 September 2010 Manufacturing and testing flexible microfluidic devices with optical and electrical detection mechanisms
Marius G. Ivan, Frédéric Vivet, Erwin R. Meinders
Author Affiliations +
Proceedings Volume 7750, Photonics North 2010; 775002 (2010) https://doi.org/10.1117/12.870318
Event: Photonics North 2010, 2010, Niagara Falls, Canada
Abstract
Flexible microfluidic devices made of poly(dimethylsiloxane) (PDMS) were manufactured by soft lithography, and tested in detection of ionic species using optical absorption spectroscopy and electrical measurements. PDMS was chosen due to its flexibility and ease of surface modification by exposure to plasma and UV treatment, its transparency in UV-Vis regions of the light spectrum, and biocompatibility. The dual-detection mechanism allows the user more freedom in choosing the detection tool, and a functional device was successfully tested. Optical lithography was employed for manufacturing templates, which were subsequently used for imprinting liquid PDMS by thermal curing. Gold electrodes having various widths and distances among them were patterned with optical lithography on the top part which sealed the microchannels, and the devices were employed for detection of ionic species in aqueous salt solutions as well as micro-electrolysis cells. Due to the transparency of PDMS in UV-Vis the microfluidics were also used as photoreactors, and the in-situ formed charged species were monitored by applying a voltage between electrodes. Upon addition of a colorimetric pH sensor, acid was detected with absorption spectroscopy.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marius G. Ivan, Frédéric Vivet, and Erwin R. Meinders "Manufacturing and testing flexible microfluidic devices with optical and electrical detection mechanisms", Proc. SPIE 7750, Photonics North 2010, 775002 (8 September 2010); https://doi.org/10.1117/12.870318
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KEYWORDS
Microfluidics

Electrodes

Gold

Silicon

Manufacturing

Optical lithography

Optics manufacturing

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