Full-wafer thermal imaging in ultrahigh epitaxy tools

Bernard Paquette; André Fekecs; Badii Gsib; Hubert Pelletier; Richard Arès

doi:10.1117/12.872967

22 September 2010 Full-wafer thermal imaging in ultrahigh epitaxy tools

Bernard Paquette, André Fekecs, Badii Gsib, Hubert Pelletier, Richard Arès

Proceedings Volume 7750, Photonics North 2010; 77500O (2010) https://doi.org/10.1117/12.872967
Event: Photonics North 2010, 2010, Niagara Falls, Canada

Abstract

The surface temperature distribution of a GaAs wafer, heated under vacuum, has been measured using a digital camera. A method is proposed to remove parasitic signals from the image. The accuracy of the thermal image is validated by comparing the results with a separate measurement from absorption band-edge spectroscopy (ABES). The thermal imaging data are observed to be within the experimental error from the ABES technique for the entire surface of the wafer. We observe a radial temperature profile with a center-to-edge difference that varies as a function of the central temperature. A difference of 25 °C is observed for a central temperature of 565 °C. This difference increases with the wafer temperature, confirming that it is due to a net heat flux escaping the wafer by its edge, which is in contact with a graphite holder. Based on these results, a solution is proposed in which the graphite wafer holder is replaced by a ceramic version.

Citation Download Citation

Bernard Paquette, André Fekecs, Badii Gsib, Hubert Pelletier, and Richard Arès "Full-wafer thermal imaging in ultrahigh epitaxy tools", Proc. SPIE 7750, Photonics North 2010, 77500O (22 September 2010); https://doi.org/10.1117/12.872967

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available