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17 May 2011 Porous silicon-based optical fiber Fabry-Perot sensor for relative humidity determination
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Proceedings Volume 7753, 21st International Conference on Optical Fiber Sensors; 775313 (2011) https://doi.org/10.1117/12.884851
Event: 21st International Conference on Optical Fibre Sensors (OFS21), 2011, Ottawa, Canada
Abstract
A fiber-optic relative-humidity sensor composed of two silver coating and a thick porous silicon film is proposed and demonstrated for relative humidity sensing. The two Ag coatings are magnetically sputtered, with porous silicon membrane sandwiched in between, which constructs a low-fineness Fabry-Perot sensing head. Experimental results show that the interference fringe of the proposed porous silicon Fabry-Perot sensor shifts by 10.3 nm when relative humidity increases from 11% to 97%. The linearity of interference fringe shift to relative humidity is averagely 0.9764 below 85% RH. The proposed sensor is suitable for relative humidity sensing in the ambient environment.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guoguang Rong, Shengfei Pan, Chao Wu, Xiaobing Li, and Minghong Yang "Porous silicon-based optical fiber Fabry-Perot sensor for relative humidity determination", Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 775313 (17 May 2011); https://doi.org/10.1117/12.884851
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