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17 May 2011Porous silicon-based optical fiber Fabry-Perot sensor for relative humidity determination
A fiber-optic relative-humidity sensor composed of two silver coating and a thick porous silicon film is proposed and
demonstrated for relative humidity sensing. The two Ag coatings are magnetically sputtered, with porous silicon
membrane sandwiched in between, which constructs a low-fineness Fabry-Perot sensing head. Experimental results show
that the interference fringe of the proposed porous silicon Fabry-Perot sensor shifts by 10.3 nm when relative humidity
increases from 11% to 97%. The linearity of interference fringe shift to relative humidity is averagely 0.9764 below 85%
RH. The proposed sensor is suitable for relative humidity sensing in the ambient environment.