Porous silicon-based optical fiber Fabry-Perot sensor for relative humidity determination

Guoguang Rong; Shengfei Pan; Chao Wu; Xiaobing Li; Minghong Yang

doi:10.1117/12.884851

Translator Disclaimer

17 May 2011 Porous silicon-based optical fiber Fabry-Perot sensor for relative humidity determination

Guoguang Rong, Shengfei Pan, Chao Wu, Xiaobing Li, Minghong Yang

Author Affiliations +

Proceedings Volume 7753, 21st International Conference on Optical Fiber Sensors; 775313 (2011) https://doi.org/10.1117/12.884851
Event: 21st International Conference on Optical Fibre Sensors (OFS21), 2011, Ottawa, Canada

Abstract

A fiber-optic relative-humidity sensor composed of two silver coating and a thick porous silicon film is proposed and demonstrated for relative humidity sensing. The two Ag coatings are magnetically sputtered, with porous silicon membrane sandwiched in between, which constructs a low-fineness Fabry-Perot sensing head. Experimental results show that the interference fringe of the proposed porous silicon Fabry-Perot sensor shifts by 10.3 nm when relative humidity increases from 11% to 97%. The linearity of interference fringe shift to relative humidity is averagely 0.9764 below 85% RH. The proposed sensor is suitable for relative humidity sensing in the ambient environment.

Citation Download Citation

Guoguang Rong, Shengfei Pan, Chao Wu, Xiaobing Li, and Minghong Yang "Porous silicon-based optical fiber Fabry-Perot sensor for relative humidity determination", Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 775313 (17 May 2011); https://doi.org/10.1117/12.884851

ACCESS THE FULL ARTICLE