Fiber-optic Fabry-Perot interferometer tip accelerometer fabricated by laser-micromachining

Zengling Ran; En Lu; Yunjiang Rao; Min Ni; Fei Peng; Dehong Zeng

doi:10.1117/12.884922

17 May 2011 Fiber-optic Fabry-Perot interferometer tip accelerometer fabricated by laser-micromachining

Zengling Ran, En Lu, Yunjiang Rao, Min Ni, Fei Peng, Dehong Zeng

Proceedings Volume 7753, 21st International Conference on Optical Fiber Sensors; 775318 (2011) https://doi.org/10.1117/12.884922
Event: 21st International Conference on Optical Fibre Sensors (OFS21), 2011, Ottawa, Canada

Abstract

A novel fiber-optic tip accelerometer based on Fabry-Perot (F-P) interferometer is proposed and demonstrated, with potential to operate under high temperature, in this paper. Such a tip accelerometer is directed fabricated on a large cladding fiber end by using the 157nm laser-micromachining technology. With the calibration of a micro electro mechanical systems (MEMS) accelerometer, the sensitivity of such a fiber-optic F-P accelerometer is 1.764 rad/g. The minimum detective acceleration is estimated to be 20μg.

Citation Download Citation

Zengling Ran, En Lu, Yunjiang Rao, Min Ni, Fei Peng, and Dehong Zeng "Fiber-optic Fabry-Perot interferometer tip accelerometer fabricated by laser-micromachining", Proc. SPIE 7753, 21st International Conference on Optical Fiber Sensors, 775318 (17 May 2011); https://doi.org/10.1117/12.884922

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