Paper
24 August 2010 Nano structured carbon nitrides prepared by chemical vapour deposition
Ramesh Karuppannan, M. Prashantha
Author Affiliations +
Abstract
Nanostructured carbon nitride films were prepared by pyrolysis assisted chemical vapour deposition(CVD). A two zone furnace with a temperature profile having a uniform temperature over a length of 20 cm length has been designed and developed. The precursor Azabenzimidazole was taken in a quartz tube and evaporated at 400 0C. The dense vapours enter the pyrolysis zone kept at a desired temperature and deposit on the quartz substrates. The FTIR spectrum of the prepared samples shows peaks at 1272 cm-1 (C.N stretching) and 1600 cm-1 (C=N) confirms the bonding of nitrogen with carbon. Raman D and G peaks, are observed at 1360 cm-1 and 1576 cm-1 respectively. XPS core level spectra of C 1s and N 1s show the formation of π bonding between carbon and nitrogen atoms. The size of the nano crystals estimated from the SEM images and XRD is ~100 nm. In some regions of the sample a maximum of 57 atom % of nitrogen has been observed.
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Ramesh Karuppannan and M. Prashantha "Nano structured carbon nitrides prepared by chemical vapour deposition", Proc. SPIE 7761, Carbon Nanotubes, Graphene, and Associated Devices III, 776104 (24 August 2010); https://doi.org/10.1117/12.861609
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KEYWORDS
Carbon

Nitrogen

Quartz

Chemical vapor deposition

Temperature metrology

Crystals

Chemical species

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