3D numerical analysis of As-diffused HgCdTe planar pixel arrays

Craig A. Keasler; Michele Moresco; Danilo D'Orsogna; Phil Lamarre; Enrico Bellotti

doi:10.1117/12.861107

26 August 2010 3D numerical analysis of As-diffused HgCdTe planar pixel arrays

Craig A. Keasler, Michele Moresco, Danilo D'Orsogna, Phil Lamarre, Enrico Bellotti

Proceedings Volume 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon; 77800J (2010) https://doi.org/10.1117/12.861107
Event: SPIE NanoScience + Engineering, 2010, San Diego, California, United States

Abstract

In this paper we present a full three-dimensional numerical simulation of Arsenic-diffused HgCdTe based planar pixel arrays intended for detection in the medium- and long-wavelength infrared spectral range. As-diffused planar detector array structures, as opposed to mesa-type structures, do not require any etching processing that causes surface damages and consequently may lead to detector arrays with higher performance than the mesa type. Because of the interest in high performance planar infrared focal plane arrays, it is critical to develop numerical simulation models useful to predict the array's performance before they are fabricated. The goal of this work is to study the dependence of the quantum efficiency and the pixel-to-pixel cross talk on the geometrical and material parameters.

Citation Download Citation

Craig A. Keasler, Michele Moresco, Danilo D'Orsogna, Phil Lamarre, and Enrico Bellotti "3D numerical analysis of As-diffused HgCdTe planar pixel arrays", Proc. SPIE 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon, 77800J (26 August 2010); https://doi.org/10.1117/12.861107

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