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18 August 2010 Silicon nitride light pipes for image sensors
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Abstract
We describe a means for improving the performance of CMOS image sensors using vertical waveguides, known as light pipes. We describe experimental results on the etching of silicon nitride pillars, and the fabrication of photodiodes.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Turgut Tut, Peter Duane, Winnie N. Ye, Munib Wober, and Kenneth B. Crozier "Silicon nitride light pipes for image sensors", Proc. SPIE 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon, 77800W (18 August 2010); https://doi.org/10.1117/12.860777
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