Nano-patterning for LED light extraction and for nanorod LED array formation

L. Y. Chen; Y. Y. Huang; C. S. Cheng; J. J. Huang

doi:10.1117/12.863797

23 August 2010 Nano-patterning for LED light extraction and for nanorod LED array formation

L. Y. Chen, Y. Y. Huang, C. S. Cheng, J. J. Huang

Proceedings Volume 7784, Tenth International Conference on Solid State Lighting; 77840B (2010) https://doi.org/10.1117/12.863797
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Natural lithography is realized by spin-coating of nanoparticles. The surface textured LED s and nanorod structured LEDs have been made successfully. Concentrated radiation profiles of nanorod structured and surface textured LED are both observed. We fabricate these nano-structure by nature lithography method which use silica nanosphere as etching mask. The SiO₂ grown by PECVD is used as a space layer to realize the nanorod LED. Furthermore, we suggest a light guided concept of the highly concentrated phenomena. The highest output power density of nanorod LEDs is achieved. The reversed current of nanorod LEDs is also reduced down to nA level.

Citation Download Citation

L. Y. Chen, Y. Y. Huang, C. S. Cheng, and J. J. Huang "Nano-patterning for LED light extraction and for nanorod LED array formation", Proc. SPIE 7784, Tenth International Conference on Solid State Lighting, 77840B (23 August 2010); https://doi.org/10.1117/12.863797

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