Paper
2 August 2010 Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter
Yukitoshi Otani, Fumio Kobayashi, Yasuhiro Mizutani, Shuugo Watanabe, Manabu Harada, Toru Yoshizawa
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Abstract
A uni-axial measurement of three dimensional surface profiles by a liquid crystal digital shifter is proposed using a telecentric optical system. Height information is captured by measuring the contrast in the projected pattern. A shadow less measurement of the object's area is archived by using a uni-axial system. The magnification of the object image captured by a CCD camera is made constant by changing the focus distance. The liquid crystal digital shifter is a powerful tool to make arbitrary intensity and frequency distribution. Surface profiles of mechanical parts were measured to demonstrate this method.
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Yukitoshi Otani, Fumio Kobayashi, Yasuhiro Mizutani, Shuugo Watanabe, Manabu Harada, and Toru Yoshizawa "Uni-axial measurement of three-dimensional surface profile by liquid crystal digital shifter", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900A (2 August 2010); https://doi.org/10.1117/12.861561
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CITATIONS
Cited by 8 scholarly publications.
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KEYWORDS
3D metrology

Liquid crystals

Distance measurement

Phase shifting

CCD cameras

Bessel functions

Calibration

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