Three-dimensional microstructure measurement by high-resolution fringe analysis for shadow moiré image by SEM

Y. Arai; S. Kanameishi; S. Yokozeki

doi:10.1117/12.859101

2 August 2010 Three-dimensional microstructure measurement by high-resolution fringe analysis for shadow moiré image by SEM

Y. Arai, S. Kanameishi, S. Yokozeki

Author Affiliations +

Proceedings Volume 7790, Interferometry XV: Techniques and Analysis; 77900E (2010) https://doi.org/10.1117/12.859101
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

A new fringe analysis for shadow moiré new fringe analysis for shadow moiré using a SEM is proposed in order to perform a high resolution 3-D shape measurement. Two sheets of shadow moiré fringe images are grabbed by shifting the grating using PZT. One sheet of deformed shadow of grating image which does not include any original grid image is reconstructed from two shadow moiré fringe images by using the new method. In experiments, a sphere that is a bearing ball(diameter:700μm) was measured by the method. The standard deviation of the difference between the measured result and the ideal shape as the sphere was 95nm. From the results, it was confirmed that the proposed method had not only a high measuring accuracy but also a spatial high-resolution power(330nm). using a SEM is proposed in order to perform a high resolution 3-D shape measurement. Two sheets of shadow moiré fringe images are grabbed by shifting the grating using PZT. One sheet of deformed shadow of grating image which does not include any original grid image is reconstructed from two shadow moiré fringe images by using the new method. In experiments, a sphere that is a bearing ball(diameter:700μm) was measured by the method. The standard deviation of the difference between the measured result and the ideal shape as the sphere was 95nm. From the results, it was confirmed that the proposed method had not only a high measuring accuracy but also a spatial high-resolution power(330nm).

Citation Download Citation

Y. Arai, S. Kanameishi, and S. Yokozeki "Three-dimensional microstructure measurement by high-resolution fringe analysis for shadow moiré image by SEM", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900E (2 August 2010); https://doi.org/10.1117/12.859101

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