Optical metrology and optical non-destructive testing from the perspective of object characteristics

Ralf B. Bergmann; T. Bothe; C. Falldorf; P. Huke; M. Kalms; C. von Kopylow

doi:10.1117/12.862266

2 August 2010 Optical metrology and optical non-destructive testing from the perspective of object characteristics

Ralf B. Bergmann, T. Bothe, C. Falldorf, P. Huke, M. Kalms, C. von Kopylow

Proceedings Volume 7791, Interferometry XV: Applications; 779102 (2010) https://doi.org/10.1117/12.862266
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

High precision optical metrology may be viewed from the perspective of the relevant object properties for optical measurement such as microstructure, surface gradient and geometrical complexity. We discuss high precision measurement methods and compare their suitability with respect to these object properties. We emphasize reflectometry and shearography as examples of two interesting techniques particularly suited for high precision optical metrology and extend the discussion to optical non destructive testing (NDT). In this context, reflectometry and shearography appear to be interesting techniques suitable for both optical metrology and NDT. We finally discuss the unique features of laser ultrasonic for NDT.

Citation Download Citation

Ralf B. Bergmann, T. Bothe, C. Falldorf, P. Huke, M. Kalms, and C. von Kopylow "Optical metrology and optical non-destructive testing from the perspective of object characteristics", Proc. SPIE 7791, Interferometry XV: Applications, 779102 (2 August 2010); https://doi.org/10.1117/12.862266

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