Design rules for catadioptric scatterometers based on measurement requirements

Wenjing Zhao; Cornelius Hahlweg; Hendrik Rothe

doi:10.1117/12.860173

1 September 2010 Design rules for catadioptric scatterometers based on measurement requirements

Wenjing Zhao, Cornelius Hahlweg, Hendrik Rothe

Proceedings Volume 7792, Reflection, Scattering, and Diffraction from Surfaces II; 77920B (2010) https://doi.org/10.1117/12.860173
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

The large variety of scatterometric applications and basic scatterometer principles demands design rules to fit the final instrument as well as the data processing and user interface into the requirements of the application in scope. In the current paper we concentrate on the optical design of scatterometers based on a combination of an elliptical mirror and a secondary imaging lens system. The design strategy involves the Scheimpflug principle on two different scales and demands various compromises concerning spot size and angular resolution. The strategy is demonstrated on a practical example.

Citation Download Citation

Wenjing Zhao, Cornelius Hahlweg, and Hendrik Rothe "Design rules for catadioptric scatterometers based on measurement requirements", Proc. SPIE 7792, Reflection, Scattering, and Diffraction from Surfaces II, 77920B (1 September 2010); https://doi.org/10.1117/12.860173

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