Present status of upgraded long trace profiler for characterization of high-precision x-ray mirrors at SPring-8

Y. Senba; H. Kishimoto; H. Ohashi; H. Yumoto; S. Goto; T. Ishikawa

doi:10.1117/12.861021

1 September 2010 Present status of upgraded long trace profiler for characterization of high-precision x-ray mirrors at SPring-8

Y. Senba, H. Kishimoto, H. Ohashi, H. Yumoto, S. Goto, T. Ishikawa

Author Affiliations +

Proceedings Volume 7801, Advances in Metrology for X-Ray and EUV Optics III; 780104 (2010) https://doi.org/10.1117/12.861021
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

The long trace profiler (LTP) at SPring-8 has been fully upgraded in-house. The environmental temperature and air pressure supplied to the air bearing were stabilized. An intensity-stabilized He-Ne laser, air-bearing slider, optical elements, and a detector were replaced to improve the stability and resolution of slope measurement. The newly installed device, a motorized swivel stage, enables automatic stitching measurements. Two steep mirrors whose range of slope is wider than the angular range of the LTP were measured by using the stitching technique.

Citation Download Citation

Y. Senba, H. Kishimoto, H. Ohashi, H. Yumoto, S. Goto, and T. Ishikawa "Present status of upgraded long trace profiler for characterization of high-precision x-ray mirrors at SPring-8", Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 780104 (1 September 2010); https://doi.org/10.1117/12.861021

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