A double-pass Fizeau interferometer system for measuring the figure error of large synchrotron optics

Geoff D. Ludbrook; Simon G. Alcock; Stewart Scott

doi:10.1117/12.861538

27 August 2010 A double-pass Fizeau interferometer system for measuring the figure error of large synchrotron optics

Geoff D. Ludbrook, Simon G. Alcock, Stewart Scott

Proceedings Volume 7801, Advances in Metrology for X-Ray and EUV Optics III; 78010A (2010) https://doi.org/10.1117/12.861538
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

A laser Fizeau interferometer system has been developed to characterize the figure error of large synchrotron X-ray mirrors using double-pass geometry. This opto-mechanical assembly comprises integrated rotation and translation stages to control: the output angle of the Fizeau interferometer; the surface normal of the optic under test; and the orientation of a high quality (λ/100) retro-reflector. To negate the effects of gravitational deformations, the system can measure long optics (up to 1.5m in length) in the geometry (sideward, downward, or upward facing) in which they will ultimately be used on a synchrotron beamline. The system has been designed to minimize environmental noise and enable the measurement geometry to be changed quickly and safely. Compared to complementary techniques, including slope profilers such as the Diamond-NOM, surface height data from the Fizeau system can be obtained more rapidly (<1 minute). This makes the technique ideally suited to investigate the many degrees of freedom of adaptive optics, including piezo bimorph mirrors. The shape of such optics can also be monitored in real time to observe the dynamic effects of the surface in response to applied voltages. Results are presented to illustrate system performance, including repeatability levels. Calibration of the reference surfaces and the required environmental conditions are also discussed.

Citation Download Citation

Geoff D. Ludbrook, Simon G. Alcock, and Stewart Scott "A double-pass Fizeau interferometer system for measuring the figure error of large synchrotron optics", Proc. SPIE 7801, Advances in Metrology for X-Ray and EUV Optics III, 78010A (27 August 2010); https://doi.org/10.1117/12.861538

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available