3D characterization of thin glass x-ray mirrors via optical profilometry

M. Civitani; M. Ghigo; O. Citterio; P. Conconi; D. Spiga; G. Pareschi; L. Proserpio

doi:10.1117/12.863879

27 August 2010 3D characterization of thin glass x-ray mirrors via optical profilometry

M. Civitani, M. Ghigo, O. Citterio, P. Conconi, D. Spiga, G. Pareschi, L. Proserpio

Author Affiliations +

Proceedings Volume 7803, Adaptive X-Ray Optics; 78030L (2010) https://doi.org/10.1117/12.863879
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

In this paper we present the "Characterization Universal Profilometer" (CUP), a new metrological instrument developed at the Brera Observatory for the 3D surface figure mapping of X-ray segmented mirrors. The CUP working principle is based on the measure of the the distance between the surface under test from a rigid reference dish. This approach is made possible by the coupled use of two sensors, the CHRocodile® optical device and the SIOS triple beam interferometer, mounted onto a proper system of x-y-z stage of translators. In this paper we describe the working principle of the new instrument. We will also present the results of the commissioning performed for a CUP breadboard developed at the Brera Observatory. The CUP offers the possibility to perform an high accuracy metrology of thin glass segments produced via hot slumping, to be used in future segmented X-ray mirrors like those foreseen aboard IXO or other projects that will make use of active X-ray mirrors.

Citation Download Citation

M. Civitani, M. Ghigo, O. Citterio, P. Conconi, D. Spiga, G. Pareschi, and L. Proserpio "3D characterization of thin glass x-ray mirrors via optical profilometry", Proc. SPIE 7803, Adaptive X-Ray Optics, 78030L (27 August 2010); https://doi.org/10.1117/12.863879

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