X-ray nanotomography in a SEM

Bart Pauwels; Xuan Liu; Alexander Sasov

doi:10.1117/12.860201

1 September 2010 X-ray nanotomography in a SEM

Bart Pauwels, Xuan Liu, Alexander Sasov

Proceedings Volume 7804, Developments in X-Ray Tomography VII; 78040S (2010) https://doi.org/10.1117/12.860201
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

We have developed an x-ray computer tomography (CT) add-on to perform X-ray micro- and nanotomography in any scanning electron microscope (SEM). The electron beam inside the SEM is focused on a metal target to generate x-rays. Part of the X-rays pass through the object that is installed on a rotation stage. Shadow X-ray images are collected by a CCD camera with direct photon detection mounted on the external wall of the SEM specimen chamber. An extensive description on the working principles of this micro/nano-CT add-on together with some examples of CT-scans will be given in this paper. The resolution that can be obtained with this set-up and the influence of the shape of the electron beam are discussed. Furthermore, possible improvements on this SEM-CT set-up will be discussed: replacing the backilluminated CCD with a fully depleted CCD with improved quantum efficiency (QE) for higher energies, reduces the exposure time by 6 when using metal targets with x-ray characteristic lines around 10 keV.

Citation Download Citation

Bart Pauwels, Xuan Liu, and Alexander Sasov "X-ray nanotomography in a SEM", Proc. SPIE 7804, Developments in X-Ray Tomography VII, 78040S (1 September 2010); https://doi.org/10.1117/12.860201

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