Paper
3 December 2010 New piezoelectric materials for SAW filters
Adrian Anghelescu, Monica Nedelcu
Author Affiliations +
Proceedings Volume 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V; 78210E (2010) https://doi.org/10.1117/12.882299
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, 2010, Constanta, Romania
Abstract
Scientific research of surface acoustic wave (SAW) devices had an early start by the end of 1960s and led to the development of high frequency and small size piezo devices. A sustained effort was dedicated for these components to be transformed into many more interesting applications for telecom market. Recently the employment of new piezo materials and crystallographic orientations open new opportunities for SAW filters. New piezoelectric crystals of gallium orthophosphate (GaPO4) provide higher electromechanical coupling than quartz, while maintaining temperature compensated characteristics similar to quartz. Based on this material phase transition of 970°C, development of new piezo devices to operate at higher temperatures up to 800°C can be done. SAW velocities about 30% lower than ST-X quartz, favors smaller and more compact devices. Other advantages of GaPO4 are: stability with high resistance to stress induced twinning, 3~4 times higher electromechanical coupling than quartz and existence of SAW temperature compensated orientations. Another family of new materials of the trigonal 32 class has received much attention recently because of their temperature behavior similar to quartz and the promise of higher electromechanical coupling coefficients. It is the family of langasite (LGS, La3Ga5SiO14), langatate (LGT, La3Ga5.5Ta0.5O14) and langanite (La3Ga5.5Nb0.5O14). Langasite crystals, easier to obtain and with the value of electromechanical coupling coefficient intermediate between quartz and lithium tantalate (k2=0.32% for 0°, 140°, 22.5° orientation and k2=0.38% for 0°, 140°, 25° orientation), enable us to design SAW filters with a relative pass band of 0.3% to 0.85%. Other piezoelectric materials are reviewed for comparison.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Adrian Anghelescu and Monica Nedelcu "New piezoelectric materials for SAW filters", Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 78210E (3 December 2010); https://doi.org/10.1117/12.882299
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KEYWORDS
Wave propagation

Quartz

Acoustics

Crystals

Phase velocity

Aluminum

Temperature metrology

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