Laser annealing of metal nanoparticles implanted in dielectrics

Andrey L. Stepanov; Vladimir I. Nuzhdin; Valery F. Valeev

doi:10.1117/12.884934

9 April 2011 Laser annealing of metal nanoparticles implanted in dielectrics

Andrey L. Stepanov, Vladimir I. Nuzhdin, Valery F. Valeev

Proceedings Volume 7822, Laser Optics 2010; 78220Q (2011) https://doi.org/10.1117/12.884934
Event: Laser Optics 2010, 2010, St. Petersburg, Russian Federation

Abstract

The interaction of excimer laser pulses with silica consisting ion-synthesized copper nanoparticles is studied. Using optical reflectance of composite layers it is established that at the initial stage laser annealing leads to the fragmentation of the nanoparticles to smaller ones. After continuous irradiation by several pulses, the nanoparticles become larger due to the heating of the surrounding glass. The laser treatment for a longer time (more than several tens pulses) results in the dissociation of nanoparticles into small clusters and individual atoms. The mechanisms responsible for the modification of the composite material under high power laser radiation are discussed.

Citation Download Citation

Andrey L. Stepanov, Vladimir I. Nuzhdin, and Valery F. Valeev "Laser annealing of metal nanoparticles implanted in dielectrics", Proc. SPIE 7822, Laser Optics 2010, 78220Q (9 April 2011); https://doi.org/10.1117/12.884934

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