Prospect of EUV mask repair technology using e-beam tool

Shingo Kanamitsu; Takashi Hirano; Osamu Suga

doi:10.1117/12.864288

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29 September 2010 Prospect of EUV mask repair technology using e-beam tool

Shingo Kanamitsu, Takashi Hirano, Osamu Suga

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Proceedings Volume 7823, Photomask Technology 2010; 782322 (2010) https://doi.org/10.1117/12.864288
Event: SPIE Photomask Technology, 2010, Monterey, California, United States

Abstract

Currently, repair machines used for advanced photomasks utilize principle method like as FIB, AFM, and EB. There are specific characteristic respectively, thus they have an opportunity to be used in suitable situation. But when it comes to EUV generation, pattern size is so small highly expected as under 80nm that higher image resolution and repair accuracy is needed for its machines. Because FIB machine has intrinsic damage problem induced by Ga ion and AFM machine has critical tip size issue, those machines are basically difficult to be applied for EUV generation. Consequently, we focused on EB repair tool for research work. EB repair tool has undergone practical milestone about MoSi based masks. We have applied same process which is used for MoSi to EUV blank and confirmed its reaction. Then we found some severe problems which show uncontrollable feature due to its enormously strong reaction between etching gas and absorber material. Though we could etch opaque defect with conventional method and get the edge shaped straight by top-down SEM viewing, there were problems like as sidewall undercut or local erosion depending on defect shape. In order to cope with these problems, the tool vender has developed a new process and reported it through an international conference [1]. We have evaluated the new process mentioned above in detail. In this paper, we will bring the results of those evaluations. Several experiments for repair accuracy, process stability, and other items have been done under estimation of practical condition assuming diversified size and shape defects. A series of actual printability tests will be also included. On the basis of these experiments, we consider the possibility of EB-repair application for 20nm pattern.

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Shingo Kanamitsu, Takashi Hirano, and Osamu Suga "Prospect of EUV mask repair technology using e-beam tool", Proc. SPIE 7823, Photomask Technology 2010, 782322 (29 September 2010); https://doi.org/10.1117/12.864288

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