Development of immersed diffraction grating for the TROPOMI-SWIR spectrometer

A. H. van Amerongen; H. Visser; R. J. P. Vink; T. Coppens; R. W. M. Hoogeveen

doi:10.1117/12.869018

13 October 2010 Development of immersed diffraction grating for the TROPOMI-SWIR spectrometer

A. H. van Amerongen, H. Visser, R. J. P. Vink, T. Coppens, R. W. M. Hoogeveen

Proceedings Volume 7826, Sensors, Systems, and Next-Generation Satellites XIV; 78261D (2010) https://doi.org/10.1117/12.869018
Event: SPIE Remote Sensing, 2010, Toulouse, France

Abstract

We have developed a novel diffraction grating based on lithographical techniques and anisotropic etching in silicon. The grating is designed for the short-wave-infrared channel of the TROPOMI imaging spectrometer that will be launched on ESA's Sentinel 5 Precursor mission to monitor trace gases in the earth atmosphere. Stringent requirements on both the imaging properties and the quality of the spectra translate to a high-tech grating. In our design the dispersion and resolution is increased with a factor 3.4 with respect to conventional gratings by using the grating in immersion, such that diffraction takes place inside the silicon grating material. By lithographic patterning and anisotropic etching of the mono-crystalline silicon we precisely control line spacing and blaze angle. The grating has a line spacing of 2.5 μm and is operated in sixth order. We show that an efficiency of 60% is reached on a 50 x 60 mm² grating surface. We compare our test results with numerical calculations for grating efficiency for both polarizations and find good agreement.

Citation Download Citation

A. H. van Amerongen, H. Visser, R. J. P. Vink, T. Coppens, and R. W. M. Hoogeveen "Development of immersed diffraction grating for the TROPOMI-SWIR spectrometer", Proc. SPIE 7826, Sensors, Systems, and Next-Generation Satellites XIV, 78261D (13 October 2010); https://doi.org/10.1117/12.869018

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available