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19 October 2010 Fabrication of a multimode-interference-based multimode power splitter in glass
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Abstract
Multimode Interference (MMI) based devices are widely used due to excellent performance. Here in this paper, a 1×2 multimode power splitter based on MMI is designed using three-dimensional beam propagation method (3D-BPM), and then fabricated in glass using the Ag+-Na+ ion-exchange technique. The width of the input and output multimode waveguides was 50μm and they were tapered to 75μm at the interface to the MMI region. The MMI region was also quadratically tapered .First, Ag+-Na+ ion exchange was run in nitrate melt at 350°C.Then an electric field was applied at 300°C so that the silver ions continued their migration award. Under the wavelength of 1550nm, the measured results showed that the propagation loss of multimode straight waveguide can be lower than 0.31dB/cm, and the insertion loss and uniformity of the splitter were 4.28dB and 0.21dB, respectively. Parameters of the fabrication process and structure of the device can be optimized to improve the performance of the device.
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Wei Xiang, Weiwei Zheng, Shuhang Jiang, Minghua Wang, Jianyi Yang, Yinlei Hao, and Xiaoqing Jiang "Fabrication of a multimode-interference-based multimode power splitter in glass", Proc. SPIE 7847, Optoelectronic Devices and Integration III, 78470N (19 October 2010); https://doi.org/10.1117/12.870755
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