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17 November 2010The 3D buried optical splitter under non-uniform electric field
A electric field technique was developed to fabricate 1×4 buried channel waveguides on
optical glass. The 40V voltage was applied on the glass to accelerate the exchange of sodium ions
in the glass and cesium ions in the salt melt. As a result, the optical loss of 0.1dB/cm was obtained
for channel waveguides of 20μm depth with the 1.550μm laser, and a 3D buried channel
waveguide is produced by the non-uniform field ion exchange under 1μm height inclined on glass.
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Zigang Zhou, Yi Xiao, Li Zhu, Chen Luo, "The 3D buried optical splitter under non-uniform electric field," Proc. SPIE 7847, Optoelectronic Devices and Integration III, 78471J (17 November 2010); https://doi.org/10.1117/12.868178