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17 November 2010 A novel silica-waveguide acousto-optic frequency shifter using ZnO piezoelectric films and its beam propagation analysis
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Abstract
A novel silica-waveguide integrated acoustooptic frequency shifter (AOFS) with high diffraction efficiency is proposed for an optical wavelength of 1.55μm in this paper. Choose tapered silica waveguides fabricated on silicon substrates by PECVD and C-axis oriented ZnO piezoelectric films deposited using RF-sputtering as the interdigital transducer for the excitation of SAW. The interdigital Al electrodes are located at the interface between the nonpiezoelectric substrates (SiO2) and the ZnO piezoelectric films, that is, ZnO/IDT/SiO2 structure; when the ZnO films thickness h and SAW's wavelength Λ satisfy the relation h/Λ=0.4~0.5, electromechanical coupling coefficient of the interdigital transducer achieves the maximum value 17%. Diffraction properties are simulated and analyzed using beam propagation method (BPM) and AO interaction area is well-designed in order to obtain optimum interaction characteristics. The results show that a diffraction efficiency of approximately 70% can be obtained.
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Chen Chen, BangRen Shi, LiJun Guo, and Meng Zhao "A novel silica-waveguide acousto-optic frequency shifter using ZnO piezoelectric films and its beam propagation analysis", Proc. SPIE 7847, Optoelectronic Devices and Integration III, 78472J (17 November 2010); https://doi.org/10.1117/12.870154
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