Paper
5 November 2010 Diffraction efficiency analysis of blazed grating fabricated by direct laser writing
Dengfeng Kuang, Zhiliang Fang
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Abstract
For the laser spot size, the blazed diffractive grating fabricated with direct laser writing will has a slantwise lateral facet edge. To evaluate the influence of the slope of the facet edge of blazed diffractive grating, we calculate the diffraction efficiencies in +1 order and zero order as a function of the angle for the slantwise lateral facet edge with rigorous coupled wave analysis. As the lateral facet edge is getting more slantwise, the diffraction efficiency in +1 order decrease more, which degrades the image quality in monochromatic imaging. But the diffraction efficiency in zero order always keeps very low to assure the application in optical limiting.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dengfeng Kuang and Zhiliang Fang "Diffraction efficiency analysis of blazed grating fabricated by direct laser writing", Proc. SPIE 7848, Holography, Diffractive Optics, and Applications IV, 78480P (5 November 2010); https://doi.org/10.1117/12.866240
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KEYWORDS
Diffraction

Diffraction gratings

Multiphoton lithography

Photoresist materials

Quartz

Etching

Optical limiting

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