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11 November 2010 A palm-top camera for 3D profilometry incorporating a MEMS scanner
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To improve difficulties inherent to the conventional three-dimensional profiling system based on pattern projection method, we have proposed incorporating a recent digital device such as a MEMS scanner into projection optics. Due to this revision, first of all, such a small size system as a palm-top camera is attainable, and low cost measurement system is potentially realized. In this system, we can control the scanner to produce the projection pattern with appropriate periodical structure and sinusoidal intensity distribution. Due to this flexible pattern projection, phase-shifting technique becomes applicable for industrial inspection and measurement in automobile industry and others. The camera is as small as a photographic digital camera in dimensional size. In addition, our recent improvement of measuring performance by modulating the projected pattern is to be demonstrated.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Yoshizawa and T. Wakayama "A palm-top camera for 3D profilometry incorporating a MEMS scanner", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78550D (11 November 2010);


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