Two-coordinate dynamic photoelectric autocollimator based on single linear CCD

Zhenglan Bian; Min Gao; Zuoren Dong; Qing Ye; Ronghui Qu; Zujie Fang

doi:10.1117/12.870026

11 November 2010 Two-coordinate dynamic photoelectric autocollimator based on single linear CCD

Zhenglan Bian, Min Gao, Zuoren Dong, Qing Ye, Ronghui Qu, Zujie Fang

Proceedings Volume 7855, Optical Metrology and Inspection for Industrial Applications; 78550H (2010) https://doi.org/10.1117/12.870026
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

A competitive homemade two-coordinate autocollimator is presented, which is able to measure the angle along the horizontal and vertical axis by using a single linear CCD to detect the three image point positions of the N shape reticle on the CCD, with total measurement error no greater than 5urad in the measurement range of ±2100urad and the dynamic response frequency 2KHz.

Citation Download Citation

Zhenglan Bian, Min Gao, Zuoren Dong, Qing Ye, Ronghui Qu, and Zujie Fang "Two-coordinate dynamic photoelectric autocollimator based on single linear CCD", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78550H (11 November 2010); https://doi.org/10.1117/12.870026

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