Time-resolved vibrational surface profile measurement of ultrasonic motor using stroboscopic oblique incidence interferometer

Yasuhiro Mizutani; Tetsuo Iwata; Yukitoshi Otani

doi:10.1117/12.871749

11 November 2010 Time-resolved vibrational surface profile measurement of ultrasonic motor using stroboscopic oblique incidence interferometer

Yasuhiro Mizutani, Tetsuo Iwata, Yukitoshi Otani

Author Affiliations +

Proceedings Volume 7855, Optical Metrology and Inspection for Industrial Applications; 78550N (2010) https://doi.org/10.1117/12.871749
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

We propose a measurement method of vibrational surface profile for an ultrasonic motor (USM) using a stroboscopic oblique incidence interferometer. A time-dependent behaviors of the stator, one of the main components of the USM, is of considerable practical interest for development of new devices. owever it is difficult to observe its surface profile because there are diffused and vibrational surface. An obliquely incident light would offer advantage of the diffused surface because of higher reflectance. Furthermore, for detecting interferences at the vibrational surface profile, a modulated light source is synchronized with electrical signals of the USM. We are successful to detect a vibrational surface of the stator.

Citation Download Citation

Yasuhiro Mizutani, Tetsuo Iwata, and Yukitoshi Otani "Time-resolved vibrational surface profile measurement of ultrasonic motor using stroboscopic oblique incidence interferometer", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78550N (11 November 2010); https://doi.org/10.1117/12.871749

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Interferometers

Oscillators

Ultrasonics

Pulsed laser operation

Prisms

Reflectivity

Electrodes

Show All Keywords

Keywords/Phrases

Search In:

Publication Years