Vacuum ultraviolet light generation at 193 nm by quasi-phase-matched quartz

Masaki Harada; Muneyuki Adachi; Ken-ichi Muramatsu; Motoi Ueda; Tsuyoshi Yamada; Sunao Kurimura

doi:10.1117/12.874130

21 February 2011 Vacuum ultraviolet light generation at 193 nm by quasi-phase-matched quartz

Masaki Harada, Muneyuki Adachi, Ken-ichi Muramatsu, Motoi Ueda, Tsuyoshi Yamada, Sunao Kurimura

Proceedings Volume 7917, Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications X; 791709 (2011) https://doi.org/10.1117/12.874130
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

Coherent all-solid-state light source of a wavelength below 200nm is attracting a lot of attention for industrial applications such as semiconductor processing, eye surgery, and micro machining. Multi-stage wavelength conversion from a high power infrared solid-state laser is a promising solution. We have developed a technology for quasi-phasematching (QPM) in crystalline quartz that utilizes stress-induced twinning. In the present paper, we report a novel stressmaintaining module that suppresses back-switching of twinning and enables QPM-SHG in the vacuum ultraviolet (VUV) region. We demonstrated the fabrication of finest periodic twins with a period of 9.6 μm and performed QPM-SHG experiment. Vacuum ultraviolet 193.4 nm light of 17 mW was generated from 177 mW fundamental light. To the best of our knowledge, this is the shortest emission wavelength ever obtained with QPM technology.

Citation Download Citation

Masaki Harada, Muneyuki Adachi, Ken-ichi Muramatsu, Motoi Ueda, Tsuyoshi Yamada, and Sunao Kurimura "Vacuum ultraviolet light generation at 193 nm by quasi-phase-matched quartz", Proc. SPIE 7917, Nonlinear Frequency Generation and Conversion: Materials, Devices, and Applications X, 791709 (21 February 2011); https://doi.org/10.1117/12.874130

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