Endurance analysis of optical master stamps for UV-replication

F. C. Wippermann; A. Reimann; G. Leibeling

doi:10.1117/12.873506

11 February 2011 Endurance analysis of optical master stamps for UV-replication

F. C. Wippermann, A. Reimann, G. Leibeling

Proceedings Volume 7926, Micromachining and Microfabrication Process Technology XVI; 792603 (2011) https://doi.org/10.1117/12.873506
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

The fabrication of optical components based on UV-replication is spreading rapidly in the field of high volume and low cost production. Hereby, a master stamp providing optical surface quality is imprinted into a liquid polymer material which can be cured under UV-exposure. Most prominent is the fabrication of miniaturized camera objectives for mobile phone applications done on wafer level. The required lens surfaces possess high sag and aspherical shape which leads to a challenging fabrication of the master stamp which consists of an array of identical convex or concave optical surfaces. We analyze the endurance of the stamp used in a step & repeat process for the fabrication of array-like structures used as master molds for UV-replication.

Citation Download Citation

F. C. Wippermann, A. Reimann, and G. Leibeling "Endurance analysis of optical master stamps for UV-replication", Proc. SPIE 7926, Micromachining and Microfabrication Process Technology XVI, 792603 (11 February 2011); https://doi.org/10.1117/12.873506

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