Fabrication of optical filters using multilayered porous silicon

Noha Gaber; Diaa Khalil; Amr Shaarawi

doi:10.1117/12.873615

14 February 2011 Fabrication of optical filters using multilayered porous silicon

Noha Gaber, Diaa Khalil, Amr Shaarawi

Proceedings Volume 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV; 79270S (2011) https://doi.org/10.1117/12.873615
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

In this work we describe a method for fabricating optical filters using multilayered porous silicon 1D photonic structure. An electrochemical cell is constructed to control the porosity of variable layers in p-type Si wafers. Porous silicon multilayered structures are formed of λ/4 (or multiples) thin films that construct optical interference filters. By changing the anodizing current density of the cell during fabrication, different porosities can be obtained as the optical refractive index is a direct function of the layer porosity. To determine the morphology, the wavelength dependent refractive index n and absorption coefficient α, first, porous silicon free standing mono-layers have been fabricated at different conditions and characterized in the near infrared region (from 1000 to 2500nm). Large difference in refractive index (between 1.6 and 2.6) is obtained. Subsequently, multilayer structures have been fabricated and tested. Their spectral response has been measured and it shows good agreement with numerical simulations. A technique based on inserting etching breaks is adopted to ensure the depth homogeneity. The effect of differing etching/break times on the reproducibility of the filters is studied.

Citation Download Citation

Noha Gaber, Diaa Khalil, and Amr Shaarawi "Fabrication of optical filters using multilayered porous silicon", Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 79270S (14 February 2011); https://doi.org/10.1117/12.873615

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