Laser processing and monitoring of Ag photodoped patterns in GeS2 amorphous films by dual functional laser scanning micro-processing/micro-scope system utilizing UV/VIS confocal laser scanning microscope

Yoshikazu Kanai; Yoshihisa Murakami; Moriaki Wakaki; Norihide Takeyama

doi:10.1117/12.874310

14 February 2011 Laser processing and monitoring of Ag photodoped patterns in GeS₂ amorphous films by dual functional laser scanning micro-processing/micro-scope system utilizing UV/VIS confocal laser scanning microscope

Yoshikazu Kanai, Yoshihisa Murakami, Moriaki Wakaki, Norihide Takeyama

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Proceedings Volume 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV; 792714 (2011) https://doi.org/10.1117/12.874310
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

The photodoping phenomenon of Ag is one of the light induced phenomena in GeS₂ amorphous chalcogenide films. Photonic structures like wave guides and micro-optics may be possible to fabricate utilizing the refractive modulation caused by the doping process of Ag, but the practical fabrication method has not been established yet. The method to monitor the doping also has to be paid attention for precise processing. In this report, a dual functional laser scanning system integrating micro-machining and micro-scope systems is proposed. An UV laser, effective for photodoping phenomenon, is used to process the doping patterns, and a VIS laser, not influential upon the material, is used to monitor the fabricated patterns. In-situ nano scale manipulation and observation processes were possible under same setup in one system. As a typical photonic pattern, diffraction gratings of Ag/GeS₂ were fabricated and optical performances were evaluated. An optical model of the light propagation in the doped layers is proposed and simulated. The mechanism for the enhanced broadening of the doped region was suggested well through the simulation. This system will open new device fabrication and help to advance the research of nanostructures and photonic crystals.

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Yoshikazu Kanai, Yoshihisa Murakami, Moriaki Wakaki, and Norihide Takeyama "Laser processing and monitoring of Ag photodoped patterns in GeS₂ amorphous films by dual functional laser scanning micro-processing/micro-scope system utilizing UV/VIS confocal laser scanning microscope", Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 792714 (14 February 2011); https://doi.org/10.1117/12.874310

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KEYWORDS

Silver

Laser scanners

Doping

Diffraction

Diffraction gratings

Laser systems engineering

Ultraviolet radiation

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